型号:CompactTurbo™ 和 MagneticTurbo™ 产品系列
产品说明: 利用涡轮分子泵可以产生高真空或者超高真空,极限真空度达10-11 mbar。
应用:在很多日常生活产品的生产过程中以及许多技术研究领域真空技术一直是决定性因素之一。涡轮分子泵对产生超纯净的生产条件起着非常重要的作用
部分产品技术参数:
HiMagTM 2400, DN 250 ISO-K
技术参数:
Compression ratio for Ar >1·109
Compression ratio for CF4 >1·109
Compression ratio for H2 1·104
Compression ratio for He 2·105
Compression ratio for N2 >1·109
Cooling method, standard Water
Cooling water consumption 100 l/h
Flange (in) DN 250 ISO-K
Flange (out) DN 40 ISO-KF
Fore Vacuum max. for N2 3 mbar
Gas throughput at 0.1 mbar HV for Ar 45 mbar l/s
Gas throughput at 0.1 mbar HV for CF4 45 mbar l/s
Gas throughput at 0.1 mbar HV for H2 15 mbar l/s
Gas throughput at 0.1 mbar HV for He 25 mbar l/s
Gas throughput at 0.1 mbar HV for N2 45 mbar l/s
Gas throughput at full rotational speed for Ar 30 mbar l/s
Gas throughput at full rotational speed for CF4 23 mbar l/s
Gas throughput at full rotational speed for H2 >70 mbar l/s
Gas throughput at full rotational speed for He 70 mbar l/s
Gas throughput at full rotational speed for N2 50 mbar l/s
Interfaces Profibus and DeviceNet optional
Pumping speed backing pump for the listed gas throughputs at least
250 m3/h
Pumping speed for Ar 1900 l/s
Pumping speed for CF4 1600 l/s
Pumping speed for H2 1800 l/s
Pumping speed for He 1900 l/s
Pumping speed for N2 2100 l/s
Rotational speed ±2% 29400 rpm
Run-up time 6 min
Sealing gas connection yes
Ultimate pressure with OnTool DryPumpTM <1·10-9 mbar
Venting connection DN 10 ISO-KF
Water temperature °C 35 °C
Weight 71 kg
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